ELECTROLUMINESCENT ELEMENT AND ITS MANUFACTURE

Japanese Patent JP3728615

B2

PROBLEM TO BE SOLVED: To prevent the deterioration of an electrode material and the deterioration of an organic EL (electroluminescent) layer attendant on a lithography process to suppress the generation of dark spots, and provide an electroluminescent element with long life and its manufacturing method.
SOLUTION: A first metal film 14 made of MgIn, having a thickness of about 3-5 nm is formed on an organic EL layer 13 by vapor deposition, and a second metal film 15 capable of dry etching, such as Al or Cr is stacked on the first metal film 14 by vapor deposition. Photo-resist 16 is patterned on the second metal film 15, and dry etching is conducted to expose the first metal film 14. O2 ashing is conducted to oxidize the exposed part of the first metal film 14 to convert there into a high resistant part for practically patterning the first metal film 14. Since a cathode is patterned by using photo lithography technique and dry etching technique, a fine cathode can be formed. Since a developing solution or water in the lithography process does not reach the first metal film 14 and the organic EL layer 13, an electroluminescent element 10 with high characteristics and ling life is realized.

Farewell

JP21124197A

December 21, 2005

July 23, 1997

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CASIO COMPUTER CO.,LTD.

H05B33/10; H01L51/50; H05B33/12; H05B33/14; H05B33/22; H05B33/26; H01L51/52; (IPC1-7): H05B33/26; H05B33/10; H05B33/14

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Hanawa Yoshio

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