Title:
ELECTROLYSIS, ELECTROLYTE AND PRODUCTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2000064083
Kind Code:
A
Abstract:
To provide an electrolytic method with bubbles generated in an electrolyte decreased in electrolysis such as electroplating and capable of performing good electrolysis, an electrolyte and a method for producing a semiconductor device using the electroplating method by the electrolyte.
An electrolyte admixed with 0.01-5% nonionic surfactant as an antifoaming agent is used to conduct such electrolysis as electroplating. An acetylenediol surfactant, an ethylene glycol surfactant, a polyethylene glycol surfactant, or the like, are used as the nonionic surfactant. When copper is electroplated, an electrolyte prepared by adding a nonionic surfactant to an aq. copper sulfate soln. as an antifoaming agent is used.
Inventors:
MUROYAMA MASAKAZU
Application Number:
JP23731098A
Publication Date:
February 29, 2000
Filing Date:
August 24, 1998
Export Citation:
Assignee:
SONY CORP
International Classes:
C25D3/02; C25D3/38; C25F3/04; H01L21/288; (IPC1-7): C25D3/02; C25D3/38; C25F3/04; H01L21/288
Attorney, Agent or Firm:
Masatomo Sugiura
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