Title:
電解処理治具及び電解処理方法
Document Type and Number:
Japanese Patent JP6783317
Kind Code:
B2
Abstract:
An electrolytic processing jig configured to perform an electrolytic processing on a processing target substrate by using a processing liquid supplied to the processing target substrate includes a base body having a flat plate shape; and a direct electrode provided on a front surface of the base body and configured to be brought into contact with the processing liquid to apply a voltage between the processing target substrate and the direct electrode. An irregularity pattern is formed on a front surface of the electrolytic processing jig at a processing target substrate side.
Inventors:
Tomohisa Hoshino
Hama Masato Taba
Satoshi Kaneko
Yasumitsu Yamaguchi
Hama Masato Taba
Satoshi Kaneko
Yasumitsu Yamaguchi
Application Number:
JP2018543792A
Publication Date:
November 11, 2020
Filing Date:
September 07, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C25D17/12; C25D17/00; C25D21/04; C25D21/10
Domestic Patent References:
| JP2015004124A | ||||
| JP2004043952A | ||||
| JP2006265709A | ||||
| JP2003528219A | ||||
| JP2003129297A |
Foreign References:
| WO2015104951A1 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine