Title:
炭化ケイ素焼結体の電解洗浄方法
Document Type and Number:
Japanese Patent JP4166883
Kind Code:
B2
Inventors:
Otsuki Pearl
Hiroaki Wada
Hiroaki Wada
Application Number:
JP34856998A
Publication Date:
October 15, 2008
Filing Date:
December 08, 1998
Export Citation:
Assignee:
Bridgestone Corporation
International Classes:
B08B3/08; H01L21/304; B08B3/12
Domestic Patent References:
| JP7161672A | ||||
| JP9064002A | ||||
| JP7263398A | ||||
| JP9153473A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda