To provide a working method capable of executing clean working which does not leave impurities on the working face in the object to be worked by using hydroxide ions in ultrapure water.
In ultrapure water, an anode 2 as the object to be worked and a cathode 1 confronted with this at prescribed intervals are arranged, the space between the object to be worked and the cathode is provided with a catalytic member 3b promoting the dissociation of the ultrapure water and having water passability, and the flow of ultrapure water is formed in the catalytic member as voltage is applied on the space between the object to be worked and the cathode, by which water molecules in the ultrapure water are decomposed into hydrogen ions and hydroxide ions, the produced hydroxide ions are fed to the surface of the object to be worked, and, by chemical elution reaction or oxidation reaction by hydroxide ions, removing working or oxidized film forming working is executed to the object to be worked.
SHIRAKASHI MICHIHIKO
SAITO TAKAYUKI
TAIMA YASUSHI
FUKUNAGA AKIRA
OBATA ITSUKI
EBARA CORP
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