To provide an electromechanical switch capable of being compatible with both low-voltage driving and high isolation.
The electromechanical switch has a first beam 106 organizing a driving section, a second beam 107 as a contact section lined up in parallel with the first beam 106 via a combining section 109, a first electrode 105 as a driving electrode formed via a first gap against the first beam 106, and a second electrode 103 as a contact electrode formed via a second gap against the second beam 107. The second gap is formed to be larger than the first gap. According to this structure, displacement generated on the driving section is transmitted to the contact section via the combining section, and switching is carried out by displacing the contact section. Consequently, gaps different on the driving section and the contact section can be formed, the electric isolation at the time of switching-off and pull-in voltage at the time of driving can be turned to a low-voltage level.
NAITO YASUYUKI
ONISHI KEIJI
Toshimitsu Ichikawa
Kimihide Hashimoto