PURPOSE: To prevent the abrasion of chuck face of an electromagnetic chuck used for adsorbing and fixing a work on the chuck face by forming a hard non-magnetic layer with large resistance against abrasion over the entire surface of the chuck of a chuck main body.

CONSTITUTION: The chuck wall 2, inner wall, outer wall 5 and partition wall 6 of a chuck main body 1 made up of iron core or other magnetic material are formed in one body, and a fixing wall 3 is removably secured on the inner wall, outer wall 5 or partition wall 6 with fasteners, etc. An electromagnetic coil 10 is housed in each coil chamber 7, and a gas 11 is formed between the internal surface of each coil chamber 7 and each electromagnetic coil 10 to flow cooling air over the entire area. Furthermore, a hard non-magnetic layer 19 with large resistance against abrasion, of ceramic like zirconia and alumina, or sintered hard alloy is coated over the chuck face 2a of the chuck main body 1.