To provide an electromagnetic drive actuator to be independently driven by two shafts.
The electromagnetic drive actuator 1 comprises a body part 10, a pair of electromagnets 30 for horizontal rotation, and a pair of electromagnets 32 for vertical rotation. The body part 10 includes : a closed frame-like gimbal part 11 displaceably supported in the Y-axis direction and undisplaceably supported in the X-axis direction; permanent magnets 12 for the gimbal part; a movable part 13 displaceable in the X-axis direction in relation to the gimbal part 11; permanent magnets 14 for the movable part disposed on the rear side of the movable part 13; an outer frame 15; torsion beams 16 for vertical rotation for suspending the gimbal part 11 to the outer frame 15; and torsion beams 18 for horizontal rotation for suspending the movable part 13 to the gimbal part 11. By passing electric current to the electromagnets 30, 32, rotational torques are generated to the torsion beams 16 for vertical rotation and/or the twisting beams 18 for horizontal rotation, to thereby vibrate the movable part 13.
ESASHI MASAKI
KAWAI YUSUKE
JP2004034256A | 2004-02-05 | |||
JP2009009093A | 2009-01-15 | |||
JP2009042607A | 2009-02-26 | |||
JP2001264663A | 2001-09-26 | |||
JP2007295780A | 2007-11-08 | |||
JPH03107116A | 1991-05-07 |
Tetsuya Shinoda
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