Title:
ELECTROMAGNETIC INDUCTION HEATING FURNACE
Document Type and Number:
Japanese Patent JPH0875371
Kind Code:
A
Abstract:
PURPOSE: To obtain a heating furnace for heating material to be heated filled therein without contaminating.
CONSTITUTION: A heating furnace is formed of silicon blocks. Only the blocks are directly high-frequency induction heated to avoid heating of substance except the silicon in the furnace. Thus, the discharge of impurities except the silicon is suppressed, and heating is conducted without contaminating charged particles.
Inventors:
ODA HIRAYUKI
TANIZAKI SHIGEKI
TANIZAKI SHIGEKI
Application Number:
JP20706994A
Publication Date:
March 19, 1996
Filing Date:
August 31, 1994
Export Citation:
Assignee:
TOKUYAMA CORP
International Classes:
C23C16/44; C23C16/442; F27B17/00; F27D11/06; H01L21/31; (IPC1-7): F27B17/00; C23C16/44; F27D11/06; H01L21/31
Attorney, Agent or Firm:
Masataka Oshima