To provide a small-sized and highly accurate electromagnetic induction type position sensor for providing a large detection signal.
This electromagnetic induction type position sensor is equipped with an AC magnetic flux generator for generating AC magnetic flux substantially of wavelength λ and a plurality of coils 6 and 7 for receiving the magnetic flux to output electromagnetic induced voltages. The coil 6 comprises eight conductor patterns 11 to 14 and 21 to 24 having sine wave shapes of a plurality of wavelengths λ plurally formed, respectively, on even numbers of layers stacked with insulation material interposed therebetween. The plurality of conductor patterns 11 to 14 formed on the same layer are disposed in such a manner that they are spaced from each other in the amplitude direction of the sine wave shapes while they are formed at the same position as the plurality of conductor patterns 21 to 24 formed on another adjoining layer. The amplitude is in opposite phase to the plurality of conductor patterns 21 to 24 formed on the other adjoining layer. The eight conductor patterns 11 to 14 and 21 to 24 are connected in series so that the conductor patterns on the adjoining other layers and the direction of an electric current look opposite to each other when they are viewed from the front of a sensor substrate 3.
FUKUI NORIYUKI
Jun Ishida
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