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Title:
ELECTROMAGNETIC ROTATING DEVICE, AND VACUUM PUMP EQUIPPED WITH THE SAME
Document Type and Number:
Japanese Patent JP2014110653
Kind Code:
A
Abstract:

To provide an electromagnetic rotating device and a vacuum pump equipped with the same, that can be downsized and that can reduce cost by consuming a power at regeneration at an electromagnet coil of a magnetic bearing device.

A motor voltage monitoring circuit 60 detects a state that a voltage of a motor drive main circuit 30 becomes higher than a voltage at a normal operation due to overshooting after arrival at a setting speed at deceleration or acceleration of a motor 121. At this time, the motor voltage monitoring circuit 60 transmits a high voltage detection signal to a braking current adjustment circuit 70 and a magnetic bearing control circuit 50. The braking current adjustment circuit 70 receives this high voltage detection signal to reduce a braking current command value of the motor 121 so that an induction voltage of the motor 121 becomes constant or is reduced. On the other hand, an amplifier control circuit 271 of the magnetic bearing control circuit 50 receives this high voltage detection signal to increase a bias current flowing in an electromagnet coil 151 and thereby increase power consumption.


Inventors:
OMORI HIDEKI
Application Number:
JP2012262591A
Publication Date:
June 12, 2014
Filing Date:
November 30, 2012
Export Citation:
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Assignee:
EDWARDS KK
International Classes:
F16C32/04; F04D19/04; H02P29/00
Domestic Patent References:
JP2003028072A2003-01-29
JP2005022321A2005-01-27
JPH04271288A1992-09-28
JPH1047346A1998-02-17
JP2005198441A2005-07-21
Attorney, Agent or Firm:
Masatoshi Shiina



 
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