Title:
電磁ベアリング装置および真空ポンプ
Document Type and Number:
Japanese Patent JP2007506019
Kind Code:
A
Abstract:
A magnetic bearing device (1) for rotatably supporting a shaft (20) for rotation about a rotation axis (101) is disclosed. The device (1) comprises a first active radial bearing (5), one or more first radial displacement sensors (81), and an axial bearing (6, 7). At least a part of the axial bearing (6, 7) is disposed between the first active radial bearing (5) and the first radial displacement sensors (81) if viewed in an orthogonal projection onto the rotation axis (101). Also a vacuum pump comprising such a magnetic bearing device (1) and a multiple-sensing unit (8) are disclosed.
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Inventors:
Buhler, philip
Razonauer, Lane
Razonauer, Lane
Application Number:
JP2006526501A
Publication Date:
March 15, 2007
Filing Date:
September 02, 2004
Export Citation:
Assignee:
Mecos Truck Slur Akchen Gezel Shaft
International Classes:
F04D19/04; F04D29/048; F16C39/06
Domestic Patent References:
| JP2000274391A | 2000-10-03 | |||
| JPH1018991A | 1998-01-20 |
Foreign References:
| US20030155829A1 | 2003-08-21 |
Attorney, Agent or Firm:
Haruo Hamada