Title:
ELECTROMECHANICAL CONVERSION DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2016086441
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To solve the problem of a conventional vibration film in which the vibration film is largely bent since a membrane with compression stress is used on a cavity side.SOLUTION: An electromechanical conversion device of the present invention includes: first electrodes; silicon oxide films formed on the first electrodes; and vibration films constituted by silicon nitride membranes formed at interval from the silicon oxide films and second electrodes formed on the silicon nitride membranes and opposing to the first electrodes.SELECTED DRAWING: Figure 1
Inventors:
TORASHIMA KAZUTOSHI
AKIYAMA TAKAHIRO
TOMIYOSHI TOSHIO
AKIYAMA TAKAHIRO
TOMIYOSHI TOSHIO
Application Number:
JP2016007422A
Publication Date:
May 19, 2016
Filing Date:
January 18, 2016
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; B81B3/00; B81C1/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2007259165A | 2007-10-04 | |||
| JP2011004280A | 2011-01-06 | |||
| JP2006211185A | 2006-08-10 | |||
| JP2009055473A | 2009-03-12 |
Foreign References:
| WO2010032156A2 | 2010-03-25 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa