Title:
電気機械変換素子及びその製造方法
Document Type and Number:
Japanese Patent JP5408935
Kind Code:
B2
Abstract:
In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate.
Inventors:
Zhang Kenroku
Application Number:
JP2008235056A
Publication Date:
February 05, 2014
Filing Date:
September 12, 2008
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R19/00; A61B8/00; H01L29/84; H04R31/00
Foreign References:
| WO2006041114A1 |
Attorney, Agent or Firm:
Tatsuya Nagao