Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTROMECHANICAL CONVERSION ELEMENT, METHOD OF MANUFACTURING THE SAME, DROPLET DISCHARGING HEAD WITH ELECTROMECHANICAL CONVERSION ELEMENT, AND DROPLET DISCHARGING APPARATUS WITH DROPLET DISCHARGING HEAD
Document Type and Number:
Japanese Patent JP2011091138
Kind Code:
A
Abstract:

To provide an electromechanical conversion element having a stable ink discharging property by which a fatigue property is suppressed, and to provide a method of manufacturing the element, a droplet discharging head having the element, and a droplet discharging apparatus having the head.

A manufacturing method at least includes the following steps of: forming a first electrode 203 composed of an oxide on a substrate 201 or a foundation film 202; forming an electromechanical conversion film 204 on the first electrode; forming a second electrode 205 composed of an oxide on the electromechanical conversion film; and conductively forming a third electrode composed of a metal to the first electrode as a common electrode. The manufacturing method arbitrarily includes the following steps of: forming an insulating protection film 206 having a contact hole for connecting a metal electrode and/or a contact hole for contacting with an exterior connector on an element construct surface; and conductively forming a fourth electrode composed of a metal to the second electrode as an individual electrode. By manufacturing an electromechanical conversion element by the manufacturing method, a liquid discharging head and a liquid discharging apparatus are constituted.


Inventors:
MIZUKAMI SATOSHI
Application Number:
JP2009242170A
Publication Date:
May 06, 2011
Filing Date:
October 21, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
RICOH CO LTD
International Classes:
H01L41/09; B05C5/00; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/18; H01L41/187; H01L41/22; H01L41/23; H01L41/29; H01L41/331
Domestic Patent References:
JP2009226796A2009-10-08
JP2007281028A2007-10-25
JP2006217721A2006-08-17
JP2007048816A2007-02-22
JP2008005464A2008-01-10
JP2005135975A2005-05-26
JP2007088442A2007-04-05
JP2006217721A2006-08-17
JP2007048816A2007-02-22
JP2008005464A2008-01-10
JP2007088442A2007-04-05
JP2009226796A2009-10-08
JP2005135975A2005-05-26
JP2007281028A2007-10-25
JP2006087285A2006-03-30
JP2008155461A2008-07-10
Attorney, Agent or Firm:
Chieko Tateno