To provide an electromechanical conversion element having a stable ink discharging property by which a fatigue property is suppressed, and to provide a method of manufacturing the element, a droplet discharging head having the element, and a droplet discharging apparatus having the head.
A manufacturing method at least includes the following steps of: forming a first electrode 203 composed of an oxide on a substrate 201 or a foundation film 202; forming an electromechanical conversion film 204 on the first electrode; forming a second electrode 205 composed of an oxide on the electromechanical conversion film; and conductively forming a third electrode composed of a metal to the first electrode as a common electrode. The manufacturing method arbitrarily includes the following steps of: forming an insulating protection film 206 having a contact hole for connecting a metal electrode and/or a contact hole for contacting with an exterior connector on an element construct surface; and conductively forming a fourth electrode composed of a metal to the second electrode as an individual electrode. By manufacturing an electromechanical conversion element by the manufacturing method, a liquid discharging head and a liquid discharging apparatus are constituted.
JP2009226796A | 2009-10-08 | |||
JP2007281028A | 2007-10-25 | |||
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JP2007048816A | 2007-02-22 | |||
JP2008005464A | 2008-01-10 | |||
JP2005135975A | 2005-05-26 | |||
JP2007088442A | 2007-04-05 | |||
JP2006217721A | 2006-08-17 | |||
JP2007048816A | 2007-02-22 | |||
JP2008005464A | 2008-01-10 | |||
JP2007088442A | 2007-04-05 | |||
JP2009226796A | 2009-10-08 | |||
JP2005135975A | 2005-05-26 | |||
JP2007281028A | 2007-10-25 | |||
JP2006087285A | 2006-03-30 | |||
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