Title:
電気機械変換装置及びその作製方法
Document Type and Number:
Japanese Patent JP5529577
Kind Code:
B2
Inventors:
Yuichi Masaki
Application Number:
JP2010029599A
Publication Date:
June 25, 2014
Filing Date:
February 14, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R19/00; A61B8/00; B81B7/04; B81C3/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2010035156A | ||||
| JP56154899A | ||||
| JP2005191828A | ||||
| JP2000298119A | ||||
| JP2008147622A |
Foreign References:
| WO2009154091A1 | ||||
| WO2008069176A1 |
Attorney, Agent or Firm:
Kazuo Kato