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Title:
ELECTROMECHANICAL SWITCH
Document Type and Number:
Japanese Patent JP2006331742
Kind Code:
A
Abstract:

To provide an electromechanical switch capable of responding to switching at a high speed with a low drive voltage.

An electromechanical switch body 10, which is a MEMS switch has a first movable electrode 14 and a second movable electrode 16 having both ends fixed and installed by a first anchor 12 and a second anchor 13 formed on a silicon substrate 2, and a fixed electrode 18 facing these movable electrodes. A first electromechanical switch 22, drivable by a low voltage, is composed of the first movable electrode 14 and the fixed electrode 18. A second electromechanical switch 24 capable of latching by low voltage is constituted of the second movable electrode 16 and the fixed electrode 18. By connecting them in parallel with each other and by alternately driving them, the first electromechanical switch waits in an off-state when the first electromechanical switch is in an on-state; and the second electromechanical switch is brought into the on-state, after the first electromechanical switch goes into the off-state by displacement of a first beam, whereby a signal can be switched over rapidly.


Inventors:
Nakanishi, Yoshito
Application Number:
JP2005000151278
Publication Date:
December 07, 2006
Filing Date:
May 24, 2005
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01H59/00; B81B3/00; H01H37/32; H01H45/00; H01H57/00; H01H61/00; H01H59/00; B81B3/00; H01H37/00; H01H45/00; H01H57/00; H01H61/00