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Patent Searching and Data


Title:
ELECTROMECHANICAL TRANSDUCER AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011244425
Kind Code:
A
Abstract:

To provide an electromechanical transducer and its manufacturing method whose reliability is improved by encapsulating a sealed cavity with a highly-airtight encapsulation structure.

The electromechanical transducer comprises a first electromagnetic element 12 and a second electromagnetic element 15 which are electrodes and such disposed facing to each other on both sides of a sealed cavity 13 which is formed by encapsulating after removing a sacrifice layer. The encapsulation part is formed by stacking a cured second sealing material 17 having fluidity at normal temperature onto a first sealing material 16 having no fluidity at normal temperature.


Inventors:
MASAKI YUICHI
HASEGAWA YOSHIHIRO
Application Number:
JP2011037773A
Publication Date:
December 01, 2011
Filing Date:
February 24, 2011
Export Citation:
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Assignee:
CANON KK
International Classes:
H04R19/04; A61B8/00; B81B3/00; B81C1/00; H01L23/02; H01L29/84; H04R31/00
Attorney, Agent or Firm:
Kazuo Kato