To provide an electromechanical transducer capable of steadily operating in the collapse mode at a lower voltage, as well as, always keeping a vibrating membrane in contact with a substrate that has a lower electrode, without having to apply external force, and to provide a manufacturing method therefor.
The electromechanical transducer is provided with a vibrating membrane 3 having a first electrode 1, a substrate 4 having a second electrode 8; and a support portion 2 for supporting the vibrating membrane with these electrodes, disposed opposite so that a space is formed between the vibration membrane and the substrate, wherein part of the area of the vibrating membrane is always in contact with the region of the substrate, without having to apply external force to the vibrating membrane and the region of the vibrating membrane, other than the region held in a contact state, can vibrate.
WO2006041114A1 | 2006-04-20 |
Next Patent: ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR