Title:
ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2017208845
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce variation in characteristics of a diaphragm of an electromechanical transducer.SOLUTION: An electromechanical transducer of the present invention includes: a substrate; a first electrode formed on the substrate; and a diaphragm which has a membrane formed to be spaced from the first electrode and has a second electrode formed on the membrane and facing the first electrode. The root-mean-square value of the surface roughness of the first electrode is 6 nm or less.SELECTED DRAWING: Figure 1
Inventors:
TOMIYOSHI TOSHIO
TORASHIMA KAZUTOSHI
AKIYAMA TAKAHIRO
TORASHIMA KAZUTOSHI
AKIYAMA TAKAHIRO
Application Number:
JP2017137178A
Publication Date:
November 24, 2017
Filing Date:
July 13, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; H04R31/00
Domestic Patent References:
| JP2009055474A | 2009-03-12 | |||
| JP2007259165A | 2007-10-04 | |||
| JP2011066156A | 2011-03-31 | |||
| JP2010272956A | 2010-12-02 | |||
| JP2006120939A | 2006-05-11 |
Foreign References:
| WO2009069555A1 | 2009-06-04 | |||
| US20050177045A1 | 2005-08-11 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa
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