To provide an electron accelerator performing maintenance of an electron beam device easily in a short time, and an electron acceleration method.
The electron accelerator includes: a vacuum chamber 46 having an electron beam exit window 24, which is a vacuum chamber 46 formed within an elongate element; an electron generator 31 arranged within the vacuum chamber 46, for generating electrons; a high voltage connector 12 arranged within the elongate element, for supplying power to the electron generator 31; and a high voltage insulator 28 for separating the vacuum chamber 46 from the high voltage connector 12. In the electron accelerator, the electron generator 31 is enclosed by a housing, and at least one opening is formed between the electron generator 31 and the electron beam exit window in the housing, and when a voltage is supplied between the housing and the electron beam exit window 24, electrons are accelerated from the electron generator 31 in the form of an electron beam to the outside of the electron beam exit window 24 sealed in the vacuum chamber 46.
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| JPS61183859A | 1986-08-16 | |||
| JPH05225934A | 1993-09-03 | |||
| JPS62198045A | 1987-09-01 | |||
| JPS6348200U | 1988-04-01 | |||
| JPH0587994A | 1993-04-09 | |||
| JPH03129650A | 1991-06-03 | |||
| JPS52117053A | 1977-10-01 |
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko