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Title:
ELECTRON BEAM DEVICE AND DEVICE MANUFACTURING METHOD USING IT
Document Type and Number:
Japanese Patent JP3723106
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To correct a deflection chromatic aberration of a primary electron beam by an E×B separator in an electron beam device.
SOLUTION: In this electron beam device, the primary electron beam emitted from a cathode 1 of an electron gun is converged by an object lens 11. The surface of a sample 12 is scanned by the converged electron beam. Secondary electrons emitted from the sample 12 are accelerated by an electric field generated by the object lens 11. The secondary electrons having just passed the object lens 11 are deflected from an optical path of the primary electron beam by E×B separators 9 and 10 and directed to a secondary electron detector 8. The E×B separators can work with such intensity as to set the deflection chromatic aberration by the electrostatic deflector 10 nearly equal to the chromatic aberration by the electromagnetic deflector 9.


Inventors:
Ichiro Nagahama
Yuichiro Yamazaki
Nakasuji Mamoru
Takao Kato
Shinji Noji
Toru Satake
Application Number:
JP2001273409A
Publication Date:
December 07, 2005
Filing Date:
September 10, 2001
Export Citation:
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Assignee:
Toshiba Corporation
Ebara Corporation
International Classes:
G01B15/00; G01N23/225; G21K1/08; G21K5/04; H01J37/147; H01J37/153; H01J37/244; H01J37/28; H01J37/29; H01L21/66; (IPC1-7): H01J37/153; G01B15/00; G01N23/225; G21K1/08; G21K5/04; H01J37/147; H01J37/244; H01J37/28; H01J37/29; H01L21/66
Domestic Patent References:
JP2000173523A
Foreign References:
WO2001033603A1
Attorney, Agent or Firm:
Kazuo Shamoto
Akio Chiba
Shigeru Ito
Fujihiro Kanda
Hiroyuki Uchida
Toru Miyamae