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Title:
電子ビーム描画方法、光学素子用金型の製造方法、光学素子の製造方法及び電子ビーム描画装置
Document Type and Number:
Japanese Patent JP4380134
Kind Code:
B2
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Inventors:
Osamu Masuda
Kazuzo Furuta
Application Number:
JP2002274307A
Publication Date:
December 09, 2009
Filing Date:
September 20, 2002
Export Citation:
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Assignee:
Konica Minolta Holdings Co., Ltd.
International Classes:
G02B5/18; B23K15/00; G03F7/20; H01L21/027
Domestic Patent References:
JP60008844A
JP5113503A
JP2000258607A
JP7005318A
JP2001311811A
Attorney, Agent or Firm:
Misawa patent office



 
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