Title:
ルテニウム被覆を有する電子ビーム放出器
Document Type and Number:
Japanese Patent JP6860691
Kind Code:
B2
Abstract:
An emitter with a protective cap layer on an exterior surface of the emitter is disclosed. The emitter can have a diameter of 100 nm or less. The protective cap layer includes ruthenium. Ruthenium is resistant to oxidation and carbon growth. The protective cap layer also can have relatively low sputter yields to withstand erosion by ions. The emitter may be part of a system with an electron beam source. An electric field can be applied to the emitter and an electron beam can be generated from the emitter. The protective cap layer may be applied to the emitter by sputter deposition, atomic layer deposition (ALD), or ion sputtering.
Inventors:
Delgado Gildardo
Garcia Edgard
Garcia Rudy
Hill francis
Garcia Edgard
Garcia Rudy
Hill francis
Application Number:
JP2019554476A
Publication Date:
April 21, 2021
Filing Date:
December 18, 2017
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J1/304; H01J37/06
Domestic Patent References:
| JP2000188059A | ||||
| JP2003288834A | ||||
| JP11016483A | ||||
| JP8273528A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office