Title:
電子線装置及びその高電圧放電防止方法
Document Type and Number:
Japanese Patent JP4261806
Kind Code:
B2
Abstract:
Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.
Inventors:
Akitsu Okura
Kimura Masashi
Kenichi Hirane
Nakayama Yoshihiko
Kimura Masashi
Kenichi Hirane
Nakayama Yoshihiko
Application Number:
JP2002038525A
Publication Date:
April 30, 2009
Filing Date:
February 15, 2002
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
Hitachi High-Tech Science Systems Co., Ltd.
Hitachi High-Tech Science Systems Co., Ltd.
International Classes:
H01J37/06; G09G1/04; H01J37/065; H01J37/24; H01J37/248; H01L21/027; H05B39/04
Domestic Patent References:
JP2002270125A | ||||
JP5275197A | ||||
JP216555U |
Attorney, Agent or Firm:
Yusuke Hiraki
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