ELECTRON BEAM EXCITATION PLASMA GENERATING EQUIPMENT

Title:

ELECTRON BEAM EXCITATION PLASMA GENERATING EQUIPMENT

Document Type and Number:

Japanese Patent JP2003007498

Kind Code:

A

Abstract:

To provide acceleration electrode structure, which prevents adhering of an insulating substance to an acceleration electrode when processing a high temperature insulation substance, and stabilizes acceleration of an electron beam for a long time, in electron beam excitation plasma generating equipment, which has the acceleration electrode installed in a process room.

In the electronic beam excitation plasma generating equipment, in which the acceleration electrode 10 is formed in a position, which counters an electron beam outlet 8 in a process chamber 3, by making the acceleration electrode 10 hollow to make it the header for inactive gas, and further by forming a through hole 13, which is opened in the direction, which counters the outlet 8, it is made to operate while supplying and discharging atmosphere gas, such as helium or the like, which is not concerned with the reaction, to the header for inactive gas from the through holes.

Inventors:

HASEGAWA TAKESHI
KASA YOSHITOKU
MORI YUKITAKA

Application Number:

JP2001184627A

Publication Date:

January 10, 2003

Filing Date:

June 19, 2001

Export Citation:

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Assignee:

KAWASAKI HEAVY IND LTD

International Classes:

G21K5/00; B01J19/08; C23C16/50; G21K5/04; H01L21/31; H05H1/24; H05H1/46; (IPC1-7): H05H1/24; B01J19/08; C23C16/50; G21K5/00; G21K5/04; H01L21/31

Domestic Patent References:

JP2000150194A	2000-05-30
JPH1167491A	1999-03-09
JPH10326695A	1998-12-08
JPH0314223A	1991-01-22
JPH06291063A	1994-10-18

Attorney, Agent or Firm:

Seki Seiji

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