To suppress the fluctuation of the orbit of electrons emitted.

In an electron beam generator having an electron source 1012 having a plurality of electron emission elements, an electrode 1019 opposed to the electron source and working on electrons emitted from time electron source, and an insulating intermediate member 1020 arranged between the electron source and the electrode, the intermediate member 1020 has a high resistivity film on its surface, the high resistivity film being electrically connected to each end of an electrically conducting material penetrating the intermediate member. The high resistivity film has a specific resistance of 10-3 to 106 Ωm and is connected to the electron source and the electrode.