To detect and control the amount of generated irradiation energy of a device, which treats a surface by repeatedly irradiating a work, set on a table having an electrical potential as much as a target, with pulses of an electronic beam passing through an anode plasma and having a large cross sectional area, by applying pulses of a high negative voltage to a cathode toward the target, in a state in which anode plasma is generated by applying a voltage between the anode and the target in the magnetic field between a ring-like anode and a plane cold cathode, which are in a low pressure gas.

A heat amount measuring set, which is installable on the surface of a table, is provided with; a heat amount measuring body with a face to be irradiated with an electronic beam, which is held in an insulated state except for a position where the body is connected to the table through a guiding line; a temperature sensor measuring the temperature of the measuring body; a measuring means reading the difference between the equilibrium temperature of a measuring body before the irradiation of a new electronic beam and that of the measuring body after the irradiation; and a device displaying an irradiated heat amount, which is calculated from the measured temperature difference and from the electronic beam irradiation area, the specific heat, and the mass of the measuring body.

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