To provide an electron beam measuring means capable of accurate three-dimensional image measurement of samples, without depending on the angle of inclination and height of the sample.
The means comprises a correction coefficient memory 32 for storing a correction coefficient for a reference angle of inclination with respect to a slope for inclining a sample 9 by a sample inclining part 5; an approximate coordinates measuring part 28 for obtaining the approximate shape or the coordinates of the sample 9, based on the output corresponding to a stereo image of an electron beam detector 4; an image correction part 30 for correcting the stereo image according to the angle of inclination of the sample inclining part 5, by using the correction coefficient stored in the correction coefficient memory 32, based on the shape or the coordinates of the sample obtained in the approximate coordinates measuring part 28; and a precision coordinates measuring part 34 for obtaining shape or coordinates of the sample, by comparing in the approximate coordinates measuring part 28, based on the stereo image corrected in the image correction part 30.
COPYRIGHT: (C)2005,JPO&NCIPI
Koike Hiromin
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