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Title:
ELECTRON BEAM RADIATION DEVICE
Document Type and Number:
Japanese Patent JP2013222648
Kind Code:
A
Abstract:

To provide an electron beam radiation device which can radiate an electron beam with high efficiency, by suppressing collision of electrons against a grid electrode.

The electron beam radiation device comprises: a cathode substrate having a carbon nanotube layer formed on the surface; a grid electrode having a plurality of opening holes and disposed to face the carbon nanotube layer on the cathode substrate while spaced apart therefrom; and a metal shield plate having a plurality of opening holes formed corresponding to the opening holes of the grid electrode, and placed on the surface of the carbon nanotube layer. The opening hole of the shield plate has a diameter larger on the grid electrode side circumference than on the cathode substrate side circumference.


Inventors:
TAKADA HIROYUKI
MAESO TAKESHI
YAMAGUCHI MASANORI
Application Number:
JP2012094582A
Publication Date:
October 28, 2013
Filing Date:
April 18, 2012
Export Citation:
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Assignee:
USHIO ELECTRIC INC
International Classes:
H01J1/304
Attorney, Agent or Firm:
Masahiko Oi



 
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