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Title:
ELECTRON DEVICE, SYSTEM, AND METHOD FOR JUDGING DEGREE OF VACUUM
Document Type and Number:
Japanese Patent JP2003240740
Kind Code:
A
Abstract:

To provide a means for judging the degree of vacuum in element units and to provide an electron device having the means, in the electron device that is sealed in a pressure-reduced atmosphere in element units.

The electron device is provided with an optical system 10, a board 30 having a plurality of infrared sensor elements 20 that are sealed by a cap body for each element, a Peltier element 50, a signal-processing circuit 60, an element-driving circuit 70, a temperature detection/Peltier element-driving circuit 80, and a shade 90 for inspection. The temperature of each bolometer is measured after a fixed time has elapsed by self heat generation of the bolometer in the infrared sensor element 20 for judging the degree of vacuum in each cap body. Since a temperature-retaining state in the cap body differs depending on the degree of vacuum, the degree of vacuum in each cap body can be judged by comparing a measurement temperature with a set value.


Inventors:
KOBUCHI HIROTO
Application Number:
JP2002039763A
Publication Date:
August 27, 2003
Filing Date:
February 18, 2002
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01L21/00; G01N25/18; H01L27/14; (IPC1-7): G01N25/18; G01L21/00; H01L27/14
Attorney, Agent or Firm:
Hiroshi Maeda (7 outside)