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Patent Searching and Data


Title:
ELECTRON EMISSION DEVICE, AND MANUFACTURING METHOD OF ELECTRON EMISSION DEVICE
Document Type and Number:
Japanese Patent JP2009199939
Kind Code:
A
Abstract:

To provide an electron emission device and a manufacturing method of it wherein focusing property of emitted electrons is improved and simplification of a manufacturing process becomes possible.

The electron emission device includes a substrate 2, a first electrode 3 arranged on the substrate 2, a second electrode 6 which is arranged on the first electrode 3 via a first insulating layer 4, selectively covers the first electrode 3, and in which a plurality of first opening parts 13 are arranged so that the first electrode 3 is exposed, a protective layer 7 arranged on the second electrode 6, a third electrode 9 which is arranged on the protective layer 7 via a second insulating layer 8 where a second opening part 14 is arranged so as to be communicated with the first opening parts 13, and an electron emitting part 5 arranged in the first opening part 13 region on the first electrode 3.


Inventors:
Kamiyama, Daisuke
Application Number:
JP2008000041778
Publication Date:
September 03, 2009
Filing Date:
February 22, 2008
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01J1/304; H01J9/02; H01J1/30; H01J9/02