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Title:
ELECTRON EMISSION ELEMENT, ELECTRON GUN, AND ELECTRON BEAM APPLICATION DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP2009129548
Kind Code:
A
Abstract:

To provide an electron emission element capable of exhibiting stable electron emission characteristics for a long time and also increasing the durability of the electron emission element.

One of features of the invention to solve the above problems is an electron emission element having a wire portion connected to an electrode, a needle portion connected to the wire portion, and a nanotube portion connected to the needle portion, wherein the wire portion, the needle portion, a bonding agent to bond the wire portion and the needle portion, and a bonding agent to bond the needle portion and the nanotube portion are made of a material containing carbon as its main ingredient. The other feature of the invention is that the needle portion of the electron emission element having the wire portion and the needle portion is sharpened and the wire portion and the needle portion are integrally formed into a body with carbon.


Inventors:
Okai, Makoto
Fujieda, Tadashi
Application Number:
JP2007000299978
Publication Date:
June 11, 2009
Filing Date:
November 20, 2007
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORP
International Classes:
H01J1/304; H01J37/06; H01J37/26; H01J37/28; H01J37/305; H01J1/30; H01J37/06; H01J37/26; H01J37/28; H01J37/305