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Title:
ELECTRON EMISSION ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP09139172
Kind Code:
A
Abstract:

To provide a uniform electron emission characteristic by minimizing the dispersion in electric characteristic even if the distance between an emitter electrode and a gate electrode is not constant.

This element is provided with a glass substitute 1, an emitter wiring layer 2 formed on a glass substrate 1, an insulation layer 7 formed on the emitter wiring layer 2, a gate electrode 8 formed on the insulation layer 7, a small hole of its specified size formed on the insulation layer 7 and the gate electrode 8, and an edge-type emitter electrode formed in the small hole and electrically connected to the emitter wiring layer 2. In this case, the emitter electrode is a two-stage constitution of an emitter top electrode 4 and an emitter bottom electrode 3 successively connected to the emitter top electrode 4, and the emitter top electrode 4 is so structured that the section thereof is shaped to have been sandwiched in a recess shape and the top tip end part of the recess shape is sharpened 4a.


Inventors:
Hoshino, Akihiro
Application Number:
JP1995000294125
Publication Date:
May 27, 1997
Filing Date:
November 13, 1995
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
H01J9/02; H01J1/30; H01J1/304; H01J9/02; H01J1/30; (IPC1-7): H01J1/30; H01J9/02