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Title:
ELECTRON EMISSION ELEMENT MANUFACTURING METHOD, ELECTRON EMISSION ELEMENT, ELECTRON SOURCE, AND IMAGE DISPLAY
Document Type and Number:
Japanese Patent JP2009170344
Kind Code:
A
Abstract:

To provide an electron emission element capable of uniformly emitting an electron beam and easy to manufacture in processes, to provide a manufacturing method thereof, to provide an electron source using the electron emission device, and to provide an image display using the electron source, having improved high-definition image quality.

The electron emission element manufacturing method includes a process of forming an electron emission film, a process of forming a first layer 103 having insulating or semi-conductive property on a substrate and a process of forming a second layer 104 mainly containing carbon on the first layer 103.


Inventors:
Teramoto, Yoji
Fujiwara, Ryoji
Nishimura, Michiyo
Nomura, Kazuji
Murakami, Shunsuke
Application Number:
JP2008000009107
Publication Date:
July 30, 2009
Filing Date:
January 18, 2008
Export Citation:
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Assignee:
CANON INC
International Classes:
H01J9/02; H01J1/304; H01J29/04; H01J31/12; H01J9/02; H01J1/30; H01J29/04; H01J31/12