Title:
ELECTRON EMISSION ELEMENT AND METHOD OF MANUFACTURING ELECTRON EMISSION ELEMENT
Document Type and Number:
Japanese Patent JP2019204632
Kind Code:
A
Abstract:
To provide an electron emission element having stable performance.SOLUTION: An electron emission element comprises: a lower electrode; an anodized layer provided on the lower electrode; an insulating layer provided on the anodized layer and provided with an opening; and a surface electrode provided on the anodized layer and the insulating layer. The anodized layer is a porous anodized film made from the lower electrode and has an intermediate layer sandwiched between the lower electrode and the surface electrode in a region overlapping the opening. The intermediate layer has: a plurality of pores; and conductive particles supported in the pores.SELECTED DRAWING: Figure 2
Inventors:
TAKASAKI MAI
SHINKAWA KOJI
IWAMATSU TADASHI
NAKAMATSU KENICHIRO
TAGUCHI TOKIO
SHINKAWA KOJI
IWAMATSU TADASHI
NAKAMATSU KENICHIRO
TAGUCHI TOKIO
Application Number:
JP2018097910A
Publication Date:
November 28, 2019
Filing Date:
May 22, 2018
Export Citation:
Assignee:
SHARP KK
International Classes:
H01J1/312; B82Y30/00; B82Y40/00; H01J9/02
Attorney, Agent or Firm:
Shintaro Nogawa
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita