To provide an electron emission source, and its forming method, with a small particle size and equipped with CNFs or GNFs grown in dispersion.
The electron emission source is provided with CNFs or GNFs grown with the use of catalyst particles made of catalyst metal formed on a substrate by using a coaxial vacuum arc deposition device 2 equipped with a coaxial vacuum arc deposition source 3 with a trigger electrode 33 and a cathode electrode 32 having at least a tip part constituted of catalyst metal arranged adjacent to each other with an interposition of an insulator 34, and with an anode electrode symmetrically arranged around the cathode electrode 32 and the trigger electrode 33, generating trigger discharge in pulse between the trigger electrode 33 and the anode electrode 31, and intermittently inducing arc discharge between the cathode electrode 32 and the anode electrode 31.
NAKANO MINAO
MURAKAMI HIROHIKO
| JP2006073514A | 2006-03-16 |
| WO2006120780A1 | 2006-11-16 |
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