To provide a manufacturing method of a cold cathode field electron emitting element which is capable of electron emission of a further lower field and can make the forming temperature of the electron emitting part to be low temperature, and in which, moreover the electron emitting part made of carbon is formed surely at the desired portion of the conductive layer.
The manufacturing method of the cold cathode field electron emitting element is made of (a) a process in which a cathode electrode 11 is formed on the support body 10, (b) a process in which an electron emitting part forming layer 50 is formed on the cathode electrode 11, and (c) a process in which an electron emitting part 15 of gimlet-shape made of carbon is formed on the electron emitting part forming layer 50.
MUROYAMA MASAKAZU
YAGI TAKAO
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