Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRON EMITTING ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH06231673
Kind Code:
A
Abstract:

PURPOSE: To obtain electron sources and image indicating elements in a simple structure with no complex process entailed by forming emitter wiring on an emitter substrate, and concurrently forming a separation layer on the surface of a gate electrode in advance.

CONSTITUTION: After a gate electrode 1 including a plurality of through holes has been made, a separation layer is formed over the surface of the electrode 1. Emitter wiring 21 is then formed, and an insulating spacer 2 is formed in an emitter substrate 20 on which an emitter electrode 21 is formed, and the electrode 1 is stuck together with the substrate 20 thereafter on which the electrode 21 and the spacer 2 are formed. Subsequently, each emitter electrode 22 in a minute projection shape is self-adjustably formed using emitter material by means of deposition. After that, the emitter material 12 adhered onto the electrode 1 by means of deposition, is peeled off via the separation layer. Thus as mentioned above, since the electrode 1 provided with the separation layer and the substrate 20 are separately manufactured, and they are stuck together so as to allow each electrode 22 in a minute projection shape to be formed thereafter, there is no need for complex processes such as one for the oblique deposition of the separation layer, so that electron emitting elements can thereby be manufactured in a comparatively simple way.


Inventors:
ISHIZAKI MAMORU
Application Number:
JP1735493A
Publication Date:
August 19, 1994
Filing Date:
February 04, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOPPAN PRINTING CO LTD
International Classes:
H01J1/304; H01J1/30; H01J9/02; (IPC1-7): H01J1/30; H01J9/02