To provide a manufacturing method of an electron emitting element, easy to manufacture, capable of controlling relatively easily metal volume in an electron emitting film, and excellent in adhesion property of electrode or the like contacting the electron emitting film and the electron emitting film.
The manufacturing method of the electron emitting element comprising a cathode electrode and an electron emitting layer including a metal located on the cathode electrode has (A) a first process to prepare a conductive first layer, a second layer located on the first layer, and a third layer containing a metal in contact with the second layer and (B) a second process to diffuse the metal in the second layer from the third layer.
COPYRIGHT: (C)2007,JPO&INPIT
Yuichi Uchio
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