Title:
ELECTRON EMITTING ELEMENT, ELECTRON SOURCE AND MANUFACTURING METHOD OF THEM, AND IMAGE DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2010010017
Kind Code:
A
Abstract:
To provide a manufacturing method of an electron emitting element equipped with an excellent carbon film on a substrate formed by laminating layers whose main component is SiO2 by a CVD method.
By the CVD method, a layer 8 whose main component is SiO2 having 2% or less of an element ratio of N is formed on a base body 1 to obtain a substrate 10, and on the substrate, there are formed element electrodes 2, 3 and conductive film 4, and furthermore, a carbon film 6 is deposited by an activation treatment.
Inventors:
MORI YOSHIMASA
TERADA MASAHIRO
NAKAMURA KATSUTOSHI
TERADA MASAHIRO
NAKAMURA KATSUTOSHI
Application Number:
JP2008169882A
Publication Date:
January 14, 2010
Filing Date:
June 30, 2008
Export Citation:
Assignee:
CANON KK
International Classes:
H01J9/02; H01J1/316; H01J31/12
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi
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