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Title:
ELECTRON EMITTING ELEMENT
Document Type and Number:
Japanese Patent JP2009211973
Kind Code:
A
Abstract:

To provide an electron emitting element in which membrane thickness flatness of an insulation layer is superior, homogeneous electron emission is possible, and which has fine patterns.

The electron emitting element includes a cathode electrode layer on a substrate, an insulation layer on which the patterns are formed by photolithography of photosensitive paste and calcination, and a gate electrode layer that are laminated in this order. The ratio of the largest membrane thickness dmax1 of the insulation layer at the marginal part within the distance of 200% of the average membrane thickness of the entire insulation layer from the peripheral end of the insulation layer to the average membrane thickness dave of the insulation layer at the other part is 0.5dmax1/dave2.


Inventors:
Kamioka, Takenori
Matsuba, Satoshi
Goto, Kazuoki
Application Number:
JP2008000054477
Publication Date:
September 17, 2009
Filing Date:
March 05, 2008
Export Citation:
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Assignee:
TORAY IND INC
International Classes:
H01J1/304; H01J1/30



 
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