Title:
ELECTRON GUN AND ELECTRON BEAM
Document Type and Number:
Japanese Patent JP3524737
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electron gun having a light source smaller than several nm.
SOLUTION: A Z driving means 11 controls an element 6 Z moving in a Z axis direction, so that a distance between a peak electrode 7 and a lead electrode 8 is set to about 1 nm. When the peak electrodes 7 are placed near to the lead electrode 8, a lead voltage of about 2 V is applied between them. With the application of this voltage, electrons in the peak electrode tunnels to the lead electrode 8, and vacuum tunnel current flows from the lead electrode 8 towards the peak electrode 7. Among the electrons emitted from the peak electrode 7, those electrons which have permeated the lead electrode 8 are accelerated by an acceleration electrode 9. An electron beam is deflected by a scanning coil 14, and a surface of a specimen is scanned two-dimensionally.
Inventors:
Kitamura, Shinichi
Application Number:
JP31684597A
Publication Date:
May 10, 2004
Filing Date:
November 18, 1997
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/073; H01J37/28; (IPC1-7): H01J37/073; H01J37/28