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Patent Searching and Data


Title:
ELECTRON GUN
Document Type and Number:
Japanese Patent JPH10223166
Kind Code:
A
Abstract:

To provide an electron gun with improved current utilization efficiency.

In this electron gun, the side surface of a cathode 1 is surrounded by a substance 2 whose emission current density is low. The cathode 1 is made of Ta, whose peripheral substance is made of W. In this electron gun, few electron beams are emitted from the peripheral substance 2 of the cathode. No electron beam is emitted from the side surface of the cathode 1, so that the emission of the electron beams 4 decreases and moves to an optical axis together to form a pencil of lines.


Inventors:
SUZUKI SHOHEI
Application Number:
JP3141097A
Publication Date:
August 21, 1998
Filing Date:
January 31, 1997
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01J37/073; (IPC1-7): H01J37/073
Attorney, Agent or Firm:
Watanabe temperature