Title:
ELECTRON-IMPACT HEATING EQUIPMENT
Document Type and Number:
Japanese Patent JP3950089
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide electron-impact heating equipment that is maintained at the same potential without causing any disconnection between a reflector and a filament over a long period even when the device repeats electron-impact heating several times and can maintain the function of the reflector over a long period.
SOLUTION: The electron-impact heating equipment has the filament 9 which generates thermoelectrons, an accelerating power source 19 which causes the thermoelectrons generated from the filament 9 to collide with a heating plate 2 by accelerating the thermoelectrons, and the reflector 3 which is provided on the backside of the filament 9 with respect to the heating plate 2 and reflects heat generated when the thermoelectrons are caused to collide with the heating plate 2. In order to set the filament 9 and reflector 3 to the same potential, the reflector 3 is connected to an electrode 15 connected with the filament 9 through a connecting member 18 in a state that the reflector 3 can slide freely in its longitudinal direction.
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Inventors:
Shigetaka Haga
Application Number:
JP2003284625A
Publication Date:
July 25, 2007
Filing Date:
August 01, 2003
Export Citation:
Assignee:
Sukegawa Electric Co., Ltd.
International Classes:
H01L21/02; H01L21/324; (IPC1-7): H01L21/02; H01L21/324
Domestic Patent References:
| JP11354526A |
Attorney, Agent or Firm:
Kazuyoshi Hojo