To provide an electron microscope or the like in which a maintenance work and a readjustment work are carried out with ease.

The electron microscope is provided with a maintenance mode consisting of a plurality of steps including an adjustment item setting step capable of setting adjustment items by selecting from a plurality of items to be adjusted necessary at the time of maintenance and inducing works necessary for adjustment for each step. In the adjustment item setting step, an operating flow 801 inducing a maintenance work sequence, a replacement sequence screen changing means 802 for changing to a replacement sequence screen displaying the explanation of replacement sequence of maintenance parts an emission current setting check button 811, an optical axis adjustment check button 812, and a nonpoint adjustment check button 813 as an adjustment item setting means 810 for setting items to be adjusted are displayed on a display part 28. The microscope executes adjustment in accordance with the adjustment items set in the adjustment item setting step.