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Title:
ELECTRON MICROSCOPE, OPERATING METHOD OF ELECTRON MICROSCOPE, OPERATING PROGRAM OF ELECTRON MICROSCOPE AND COMPUTER READABLE RECORD MEDIUM
Document Type and Number:
Japanese Patent JP2004158364
Kind Code:
A
Abstract:

To provide an electron microscope or the like capable of easily setting image observation conditions for a rough-vacuum observation.

The electron microscope is provided with a sample specifying means specifying characteristics of samples, a simple image observation condition setting means capable of setting one kind of image observation conditions from a plurality of preset kinds of simple image observation conditions including a setting of a degree of vacuum based on the characteristics of the samples, a preview-setting means setting a preview function of simply forming and displaying a plurality of simple observation images based on a plurality of different simple image observation conditions, and an individual condition setting means capable of arbitrarily setting at least either of a spot size of electron beams on the sample, accelerating voltage, kinds of detecting units, and the degree of vacuum as image observation conditions. A plurality of observation images are simply formed based on a plurality of image observation conditions including the degree of vacuum as one of the parameters, and the preview function for displaying in a second display area is executed.


Inventors:
Furukawa, Yutaka
Hirata, Tomohiko
Application Number:
JP2002000324897
Publication Date:
June 03, 2004
Filing Date:
November 08, 2002
Export Citation:
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Assignee:
KEYENCE CORP
International Classes:
H01J37/22; G01N23/225; G01Q30/02; G01Q30/04; G01Q30/16; G01Q40/00; G21K7/00; H01J37/18; H01J37/24; H01J37/26; H01J37/28; (IPC1-7): H01J37/28; H01J37/18; H01J37/22; H01J37/24
Attorney, Agent or Firm:
豊栖 康司
豊栖 康弘