Title:
ELECTRON MICROSCOPE PROVIDED WITH SAMPLE IRRADIATING ELECTRON BEAM QUANTITY MEASURING UNIT
Document Type and Number:
Japanese Patent JPS5330865
Kind Code:
A
Abstract:
PURPOSE: To protect a sample from being damaged by irradiating electron beam by using a means-which measures and observes a sample irradiating electron beam quantity at a sample observation time-and a means-which controls an irradiating electron beam quantity within the range wherethe sample cannot be damaged.
Inventors:
KATAGIRI SHINJIROU
SHINOHARA MINORU
KAMIMURA MASASHI
SHINOHARA MINORU
KAMIMURA MASASHI
Application Number:
JP10486476A
Publication Date:
March 23, 1978
Filing Date:
September 03, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/04; H01J37/26; H01J37/22; (IPC1-7): H01J37/22; H01J37/26
Domestic Patent References:
| JP43002128A | ||||
| JP49060651B |