Title:
電子顕微鏡の分解能評価用試料及び電子顕微鏡の分解能評価方法並びに電子顕微鏡
Document Type and Number:
Japanese Patent JP4922710
Kind Code:
B2
Abstract:
A method of evaluating a resolution of a scanning electron microscope includes picking up a first image of a concave and convex pattern formed on a surface of a sample utilizing a first scanning electron microscope, picking up a second image of the concave and convex pattern on the sample utilizing a second scanning electron microscope, respectively processing the first image and the second image in order to evaluate unevenness in resolution between the first scanning electron microscope and the second scanning electron microscope, and determining whether a height of the concave and convex pattern as measured from a bottom thereof is sufficient so that no affection by a secondary electron emitted from the bottom of the concave and convex pattern is exhibited.
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Inventors:
Large Saki Mayuka
Chie Shishido
Maki Tanaka
Hiroki Kawada
Chie Shishido
Maki Tanaka
Hiroki Kawada
Application Number:
JP2006253718A
Publication Date:
April 25, 2012
Filing Date:
September 20, 2006
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20; G01N1/28; G01N23/225; H01J37/22; H01J37/28
Domestic Patent References:
| JP2005268231A | ||||
| JP2003302214A | ||||
| JP1132038A | ||||
| JP2003037139A | ||||
| JP2003173948A |
Attorney, Agent or Firm:
Manabu Inoue