To provide an electron microscope capable of carrying out observation with respect to an arbitrary sample (including a raw biological sample such as a living cell) in an atmospheric-pressure condition without needing pretreatment at all.
Differential evacuation is carried out by mounting a minute orifice 130 with an electron-permeable membrane (for instance, a collodion membrane) 132 to a vacuum casing 100. A sample S is scanned by using a movable stage 202 (in particular, a scanner 204) instead of running an electron beam B. In addition, by bringing the sample S close to the electron-permeable membrane (collodion membrane) 132, electrons R (and secondary electrons) reflected from the sample S by radiation of the electron beam B are detected by using an upper reflected electron detector 304 on the high vacuum side and a lower reflected electron detector 306 on the atmospheric-pressure side (and a secondary electron detector 302 on the high vacuum side).
SHIMIZU TETSUO
ONO TERUAKI
NAT INST OF ADV IND & TECHNOL
TECHNEX LAB CO LTD
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